TEM data analysis refers to a data processing method to obtain sample structure information through a series of measurements, analysis, and calibration of the original spectrum. It is not as intuitive and understandable as the surface topography. Due to the complexity of the sample structure and interaction, the obtained image is also very complicated. In this way, the internal structure of the sample can be understood based on the information obtained from the transmission electron image. Different structures have different interactions. The transmission electron microscope (TEM) will interact with the atoms inside the sample after the incident electrons pass through the sample, thereby changing its energy and direction of movement.